Work

Infrared spectroscopic study of thin films of poly(methylsilane), its oxidation, and its transformation into poly(carbosilane) on the surfaces of silicon single-crystal wafers

Year: 1994

Type: article

Source: Chemistry of Materials

DOI: 10.1021/cm00043a020

Authors: Mihai Scarlete, Stephane Brienne, Ian S. Butler, John F. Harrod

Language: English

Topic: Silicone and Siloxane Chemistry

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2058772431

FWCI: 1.688

Cites:

Cited by: 24

Related to: 10