Work

Control of duty ratio in waveguide gratings using a near-field holographic lithography system with a variable aperture

Year: 2008

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2008.01.094

Authors: Jun-Ho Sung, Jeong-Su Yang, Bo-Soon Kim, Chul-Hyun Choi, Min-Woo Lee, Seung-Gol Lee, Se-Geun Park, El-Hang Lee, Beom-Hoan O

Institution: Inha University

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2059014366

FWCI:

Cites: 9

Cited by: 5

Related to: 10