Fabrication of low-loss GaAs/AlGaAs Mach Zehnder modulators using proton isolation
Year: 1997
Type: conference-paper
DOI: 10.1117/12.298243
Authors: Michelle M. Bourke, John M. Heaton, Chris D. Watson, Brian H. Smith, Keith P. Hilton, David R. Wight, Edward Chidley, Donald McGillivray
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2059934524