Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas
Year: 2006
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.2425044
Institutions: Ruhr University Bochum, Dublin City University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2060600644