Year: 1996
Type: article
Abstract: Sacrificial etching of III - V compounds is reviewed with emphasis on its use in surface micromachining of micromechanical structures. A table is presented with 23 different combinations of stopping layers, sacrificial layers, and etchants for sacrificial etching of GaAs- and InP-based epitaxial heterostructures. Examples of surface micromachined microstructures of III - V compounds are shown, and some possible applications are discussed.
Author: Klas Hjort
Institution: Uppsala University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2060728988