Work

Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering

Year: 2001

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.1363695

Authors: M. A. Mansour ElSabbagh, M.D. Bowden, K. Uchino, K. Muraoka

Institution: Kyushu University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2061237335

FWCI: 2.002

Cites: 14

Cited by: 26

Related to: 10