Work

Nano-motion actuator with large working distance for precise track following

Year: 2006

Type: article

Source: Microsystem Technologies

DOI: 10.1007/s00542-006-0278-9

Authors: Shigeki Mori, Masato Furuya, Akihiro Naganawa, Yotsugi Shibuya, Goro Obinata, Kazuhiro Ouchi

Institutions: Akita Industrial Technology Center, Akita University, Nagoya University

Language: English

Topic: Piezoelectric Actuators and Control

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Japan Science and Technology Corporation

OpenAlex ID: W2061403045

FWCI: 1.855

Cites: 10

Cited by: 10

Related to: 10