Synergetic effects during sputter-assisted depth profiling: Growth-dominated topography development on InP and a model of the atomic mechanism
Year: 1987
Type: article
Source: Microchimica Acta
DOI: 10.1007/bf01199493
Authors: Werner H. Gries, Klaus Miethe
Institution: Deutsche Bundespost
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2061961027