Work

Characteristics of silicon substrates fabricated using nanogrinding and chemo-mechanical-grinding

Year: 2007

Type: article

Source: Materials Science and Engineering A

DOI: 10.1016/j.msea.2007.06.061

Authors: H. Huang, B.L. Wang, Y. Wang, J. Zou, L. Zhou

Institutions: The University of Queensland, Centre for Microscopy and Microanalysis, Ibaraki University

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Australian Research Council

OpenAlex ID: W2062008164

FWCI: 3.89

Cites: 19

Cited by: 101

Related to: 10