Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD
Year: 2011
Type: article
Source: Journal of Crystal Growth
Institution: Seoul National University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G6487132529
OpenAlex ID: W2062590633
