Work

Electron Density Measurements in UV-Preionized XeCl and CO2 Laser Gas Mixtures

Year: 1989

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.28.2219

Authors: Shigeyuki Takagi, Saburo Sato, Tatsumi Goto

Institution: Toshiba (Japan)

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2063077445

FWCI: 0.923

Cites: 7

Cited by: 13

Related to: 10