High hermetic performance of glass frit for MEMS package
Year: 2010
Type: conference-paper
Authors: Hong-da Chang, Chun-An Huang, Sean Liu, Simon Lin, Mark Liao, Steve Chiu, Carl Chen
Institution: Siliconware Precision Industries (Taiwan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2064366753