Work

Silicon carbide on insulator formation using the Smart Cut process [Note 1]

Year: 1996

Type: article

Source: Electronics Letters

DOI: 10.1049/el:19960717

Authors: L. Di Cioccio, Y. Le Tiec, F. Letertre, C. Jaussaud, M. Bruel

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2065370366

FWCI: 12.12

Cites: 4

Cited by: 131

Related to: 10