Work

First realization and characterization of multilayer EUV reflective coatings

Year: 2001

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.450947

Authors: Piergiorgio Nicolosi, Alessandro Patelli, Maria-Guglielmina Pelizzo, Valentino Rigato, Gianluigi Maggioni, L. Depero, E. Bontempi, G. Mattei, Luca Poletto, Paolo Mazzoldi, Giuseppe Tondello

Institutions: University of Padua, Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali di Legnaro, University of Brescia

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2065423205

FWCI: 2.682

Cites:

Cited by: 6

Related to: 10