Optical scatterometry of subwavelength diffraction gratings: neural-network approach
Year: 1998
Type: article
Source: Applied Optics
DOI: 10.1364/ao.37.005830
Authors: Ilkka Kallioniemi, Jyrki Saarinen, Erkki Oja
Institution: Aalto University
Language: English
Subfield: Instrumentation
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2067006558