Diagnostic study of low-pressure Ar– remote plasma generated in HCD-L 300 system: Relative density of O atom
Year: 2007
Type: article
Source: Vacuum
Authors: S. Saloum, M. Naddaf
Institution: Atomic Energy Commission of Syria
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2068280573