Work

Damage morphologies and causes of laser-induced damage of thin oxide films at 248 nm

Year: 1995

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.213755

Authors: G. Pfeifer, E. Erben, Guenter Reisse, Bernhard Steiger

Institution: Hochschule Mittweida

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2069050485

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