Production of a large diameter electron cyclotron resonance plasma using a multislot antenna for plasma application
Year: 1995
Type: article
Source: Review of Scientific Instruments
DOI: 10.1063/1.1146063
Institution: Kyushu University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2069130239