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Technological principles of motion parameter transducers based on mass and charge transport in electrochemical microsystems

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Year: 2012
Type: article
Source: Russian Journal of Electrochemistry
DOI: 10.1134/s1023193512070038
Authors: V. G. Krishtop, V. M. Agafonov, A. S. Bugaev
Institutions: Russian Academy of Sciences, Moscow Institute of Physics and Technology, Institute of Microelectronics Technology and High Purity Materials, Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences
Language: English

Topic: Advanced MEMS and NEMS Technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed
OpenAlex ID: W2069986458
FWCI: 2.539
Cites: 4
Cited by: 64
Related to: 10
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