Work

PZT capacitor with Ir/IrO2/Ir electrode fabricated by RTA

Year: 1996

Type: article

Source: Integrated ferroelectrics

DOI: 10.1080/10584589608013057

Authors: Katsuyoshi Matsuura, Masaaki Nakabayashi, Tetsuro Tamura, Koichiro Honda, Seigen Ohtani

Institution: Fujitsu (Japan)

Language: English

Topic: Ferroelectric and Piezoelectric Materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2070109356

FWCI:

Cites: 5

Cited by: 1

Related to: 10