Work

Thin-film thickness profile measurement using a Mirau-type low-coherence interferometer

Year: 2013

Type: article

Source: Measurement Science and Technology

DOI: 10.1088/0957-0233/24/7/075002

Authors: Young-Sik Ghim, Hyug-Gyo Rhee, Ho-Soon Yang, Yun-Woo Lee

Institution: Korea Research Institute of Standards and Science

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2070110550

FWCI: 1.596

Cites: 29

Cited by: 38

Related to: 10