Work

Thin-Film Piezoelectric Unimorph Actuator-Based Deformable Mirror With a Transferred Silicon Membrane

Year: 2006

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2006.880208

Authors: E.-H. Yang, Y. Hishinuma, J.-G. Cheng, S. Trolier-Mckinstry, E. Bloemhof, B.M. Levine

Institutions: Stevens Institute of Technology, Fujifilm (Japan), Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, Pennsylvania State University, Jet Propulsion Laboratory

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Jet Propulsion Laboratory, Division of Materials Research

OpenAlex ID: W2070126136

FWCI: 2.953

Cites: 26

Cited by: 35

Related to: 10