Work

Table Model Projector for the Bragg-Huggins Masks

Year: 1955

Type: article

Source: Review of Scientific Instruments

DOI: 10.1063/1.1771252

Authors: Barton Howell, Dan McLachlan

Institution: University of Utah

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2071007352

FWCI: 1.169

Cites: 5

Cited by: 2

Related to: 10