Work

Evaluating the abrasive wear of Zn1−xMnxO heteroepitaxial layers using a nanoscratch technique

Year: 2010

Type: article

Source: Microelectronics Reliability

DOI: 10.1016/j.microrel.2010.05.003

Authors: Yu-Ming Chang, Hua-Chiang Wen, Chu-Shou Yang, Derming Lian, Chien-Huang Tsai, Jyh-Shyang Wang, Wen-Fa Wu, Chang-Pin Chou

Institutions: National Yang Ming Chiao Tung University, National Chin-Yi University of Technology, Tatung University, Nan Kai University of Technology, Chung Yuan Christian University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Council, Shanghai Ocean University

OpenAlex ID: W2071297465

FWCI: 4.539

Cites: 35

Cited by: 17

Related to: 10