Work

Electrical and electron microscopy observations on defects in ion implanted silicon

Year: 1971

Type: article

Source: Radiation Effects

DOI: 10.1080/00337577108231102

Author: M. D. Matthews

Institution: Research Complex at Harwell

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2071428093

FWCI: 1.202

Cites: 13

Cited by: 19

Related to: 10