Work

Electrical and optical characterization of SiONC dielectric thin film deposited by polymer-source chemical vapor deposition

Year: 2007

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.2717607

Authors: El Hassane Oulachgar, Cetin Aktik, Mihai Scarlete, Starr Dostie, Rob Sowerby, Subhash Gujrathi

Institutions: Université de Sherbrooke, Bishop's University, Université de Montréal

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Natural Sciences and Engineering Research Council of Canada

OpenAlex ID: W2072445293

FWCI: 0.305

Cites: 22

Cited by: 10

Related to: 10