Production of AlN films: ion nitriding versus PVD coating
Year: 2004
Type: article
Source: Thin Solid Films
Authors: U. Figueroa, O. Salas, J. Oseguera
Institution: Tecnológico de Monterrey
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2073449234