Work

Focused ion beam micromachined three-dimensional features by means of a digital scan

Year: 1990

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

DOI: 10.1116/1.585078

Authors: H. Ximen, R. K. DeFreez, J. Orloff, R. A. Elliott, G. A. Evans, N. W. Carlson, M. Lurie, D. P. Bour

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2073563129

FWCI: 1.488

Cites:

Cited by: 24

Related to: 10