Work

Analysis of Product Species in Capacitively Coupled C 5F 8 Plasma by Electron Attachment Mass Spectroscopy

Year: 1999

Type: article

Abstract: The decomposition and reaction products of C5F8 gas in a capacitively coupled plasma have been investigated by electron attachment mass spectroscopy (EAMS). Although only a few species are produced directly from C5F8 molecules by dissociative electron attachment, a variety of species appears after the discharge is ignited. The products comprise not only fragmented species but also polymerized species with larger masses than that of the parent molecule. It has been clarified from the energy spectra of the F- signal that perfluoro-compounds such as CF4, C2F6 and C3F8 are produced through the decomposition of C5F8, followed by secondary reactions in the gas phase. A tendency towards polymerization with increments of CF2 units is also noted.

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.38.l888

Authors: Shinichi Imai Shinichi Imai, Kunihide Tachibana Kunihide Tachibana

Institution: Kyoto University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funder: Association of Super-Advanced Electronics Technologies

OpenAlex ID: W2073592452

FWCI: 2.993

Cites: 4

Cited by: 12

Related to: 10