Work

Selective area etching of InP with CBr4 in MOVPE

Year: 2006

Type: article

Source: Journal of Crystal Growth

DOI: 10.1016/j.jcrysgro.2006.10.121

Authors: C. Ebert, J. Levkoff, J. Roberts, J. Seiler, C. Wanamaker, T. Pinnington

Language: English

Topic: Semiconductor Lasers and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2076226509

FWCI: 1.012

Cites: 5

Cited by: 10

Related to: 10