Work

Self-consistent modeling of surface wave produced discharges at low pressures

Year: 1991

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.349137

Authors: A. B. Sá, C. M. Ferreira, S. Pasquiers, C. Boisse-Laporte, P. Leprince, J. Marec

Institutions: Instituto Superior Técnico, Universidade Técnica de Lisboa, Université Paris-Sud, Centre National de la Recherche Scientifique, Laboratoire de Physique des Gaz et des Plasmas

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2076863057

FWCI: 6.721

Cites: 35

Cited by: 73

Related to: 10