Work

Fabrication and testing of polymer cantilevers for VOC sensors

Year: 2013

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2013.01.011

Authors: N. Shiraishi, T. Ikehara, D.V. Dao, S. Sugiyama, Y. Ando

Institutions: NMEMS Technology Research Organization, Tokyo University of Agriculture and Technology, National Institute of Advanced Industrial Science and Technology, Griffith University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2077058664

FWCI: 2.231

Cites: 22

Cited by: 26

Related to: 10