Total test repeatability: a new figure of merit for CD metrology tools
Year: 2004
Type: conference-paper
DOI: 10.1117/12.544249
Authors: Hugo Cramer, Ton Kiers, Peter Vanoppen, Jeroen Meessen, Frans Blok, Mircea V. Dusa
Institutions: ASML (Netherlands), ASML (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2078635976