Work

The fabrication of TiN films by reactive evaporation and rapid thermal annealing

Year: 1988

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.340980

Authors: M. Repeta, L. Dignard-Bailey, J. F. Currie, J. L. Brebner, K. Barla

Institutions: Polytechnique Montréal, Université de Montréal

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2080172237

FWCI: 0.518

Cites: 11

Cited by: 18

Related to: 10