Submicron-sized actuators based on enhanced shape memory composite material fabricated by FIB-CVD
Year: 2012
Type: article
Abstract: An enhanced scheme for a functional bilayered composite material with shape memory effect has been successfully applied on the microscale to fabricate a thermally controlled microactuator. Fabrication of cantilever-type microactuators from melt spun ribbon of TiNiCu shape memory alloy included electro-chemical polishing followed by focused ion beam milling and ion-assisted chemical vapor deposition of Pt elastic layer. The smallest working microactuator had a volume of 0.9 µm 3 . The structure and thermal stability of the Pt layer have been investigated. The fabricated actuator has been proposed for use as micromechanical nanotweezers for manipulation of submicron- and nano-sized objects. Manipulation of a carbon nanotube bunch has been demonstrated.
Source: Smart Materials and Structures
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
Awards: G207856691, G3458792294, G7211949399
OpenAlex ID: W2082078377