A new version of sputter ion source utilizing an ionizer of platinum plate
Year: 1979
Type: article
Source: Nuclear Instruments and Methods
Authors: Mikio Yamanouchi, Yoshihumi Higashi, Hidenori Yamaguchi, Mitsuharu Okamoto
Institution: University of Tsukuba
Language: English
Subfield: Nuclear and High Energy Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Funder: University of Tsukuba
OpenAlex ID: W2083072007
