Work

Synthesis and characterization of novel fluorinated polycarbonate negative-type photoresist for optical waveguide

Year: 2015

Type: article

Source: Polymer

DOI: 10.1016/j.polymer.2015.01.074

Authors: Zhenzhen Cai, Huanyang Yu, Yingchao Zhang, Ming Li, Xiaoyan Niu, Zuosen Shi, Zhanchen Cui, Changming Chen, Daming Zhang

Institutions: Jilin University, State Key Laboratory of Supramolecular Structure and Materials, Jilin Jianzhu University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G2462837135, 可紫外写入含氟聚碳酸酯波导材料的合成研究与器件制备, G3939596297

OpenAlex ID: W2083832769

FWCI: 1.119

Cites: 41

Cited by: 23

Related to: 10