Year: 2009
Type: article
Abstract: Proximity effects causing thickening and bending of closely spaced, free-standing pillars grown by electron-beam-induced deposition are investigated. It is shown that growth of a new pillar induces deposition of a layer of additional material on the side of already grown pillars facing the new pillar. We present experimental results which suggest that the bending of pillars is caused by shrinkage of the newly formed layer on exposure to the primary electron beam.
Source: Nanotechnology
Authors: Daniel J Burbridge, Sergey N Gordeev
Institution: University of Bath
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2084167752