Non-contact atomic force microscope with a PZT cantilever used for deflection sensing, direct oscillation and feedback actuation
Year: 2002
Type: article
Source: Applied Surface Science
Authors: Y. Miyahara, M. Deschler, T. Fujii, S. Watanabe, H. Bleuler
Institutions: École Polytechnique Fédérale de Lausanne, Nikon (Japan)
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2084852159