Work

X-ray elastic constants, stress profiling and composition of physically vapor deposited ZrN films

Year: 1991

Type: article

Source: Thin Solid Films

DOI: 10.1016/0040-6090(91)90220-r

Authors: R.Y. Fillit, A.J. Perry, C. Strandberg

Institution: GTE (United States)

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2085704470

FWCI: 2.034

Cites: 18

Cited by: 15

Related to: 10