The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor
Year: 2011
Type: article
Abstract: Polysilicon is a very attractive material in microelectronics for thermal sensors. In this paper, the effect of humidity on thermal resistance of surface micromachined polysilicon is invested. It is found that the thermal conductivity variation of air due to humidity changes the suspended polysilicon resistor evidently. This property could be used as the working principle of relative humidity sensor.
Source: Key engineering materials
Authors: Hong Yu Ma, Wei Dong Zhang, En Jie Ding
Institution: China University of Mining and Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W2086865709