Simulation experiment on chemical sputtering of carbides for the ECR and glow discharge cleaning
Year: 1984
Type: article
Source: Journal of Nuclear Materials
Authors: Y. Sakamoto, H. Oyama, S. Kakinuma
Institution: RIKEN
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Funder: RIKEN
OpenAlex ID: W2087186830
