Ion implantation in predoped CVD diamond
Year: 1996
Type: article
Source: Thin Solid Films
Authors: H. Yagyu, M. Deguchi, Y. Mori, A. Hatta, T. Ito, M. Kitabatake, H. Sakakima, T. Hirao, A. Hiraki
Institutions: The University of Osaka, Panasonic (Japan)
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2087213985
