Liquid metal micro-droplet generator for laser produced plasma target delivery used in an extreme ultra-violet source
Year: 2005
Type: conference-paper
DOI: 10.1117/12.601045
Authors: J. M. Algots, Oscar Hemberg, Alexander Bykanov
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2087615514