Work

Theoretical sputtering yields of Al and Mg targets in physical vapor deposition processes

Year: 2001

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.1365139

Authors: J. M. Bordes, Ch. Bordes, E. Ehret, R. Gschwind, Ph. Bauer

Institution: Université de Franche-Comté

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2088763517

FWCI: 1.072

Cites: 31

Cited by: 6

Related to: 10