Improvement of bonding time and quality of anodic bonding using the spiral arrangement of multiple point electrodes
Year: 2002
Type: article
Source: Sensors and Actuators A Physical
Authors: Jung-Tang Huang, Hsueh-An Yang
Institution: National Taipei University of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Council
OpenAlex ID: W2088779136