Work

Electrically trimmable silicon micromachined pressure switch

Year: 1990

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/0924-4247(90)85010-2

Authors: D.W. De Bruin, H.V. Allen, S.C. Terry, J.H. Jerman

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2091055049

FWCI: 0.468

Cites:

Cited by: 7

Related to: 10