Modulated ion beam studies of product formation and ejection in ion-induced etching of GaAs by Cl2
Year: 1988
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.340022
Authors: M. S. Ameen, T. M. Mayer
Institution: University of North Carolina at Chapel Hill
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2091243280