Work

Optical characterization of indium-tin-oxynitride fabricated by RF-sputtering

Year: 2003

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2003.10.046

Authors: E. Aperathitis, M. Modreanu, M. Bender, V. Cimalla, G. Ecke, M. Androulidaki, N. Pelekanos

Institutions: Foundation for Research and Technology Hellas, Technische Universität Ilmenau

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2092236688

FWCI: 0.662

Cites: 15

Cited by: 13

Related to: 10