Patterning of highly oriented pyrolytic graphite by oxygen plasma etching
Year: 1999
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.124316
Authors: Xuekun Lu, Hui Huang, Nikolay Nemchuk, Rodney S. Ruoff
Institution: Washington University in St. Louis
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2092252425